SIMS profile quantification by maximum entropy deconvolution

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[1] Allen, P.N.
[2] Dowsett, M.G.
[3] Collins, R.
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Allen, P.N. | 1600年 / 20期
关键词：
Blurring process - Depth measurement - Depth profiling - Empirical model - Entropy deconvolution - Mass transport phenomena - Probe ion - Secondary ion mass spectroscopy;
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