TEM Cross Section Preparation of SOI Structures.

被引：0
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作者：
Nagdajev, Jevgeni N.
Hoeppner, Kristina
Scharff, Wolfram
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来源：
Wiss Z Tech Univ Karl Marx Stadt | 1987年 / 29卷 / 04期
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摘要：
MICROELECTRONICS - MICROSCOPIC EXAMINATION - Transmission Electron Microscopy - OPTOELECTRONIC DEVICES - SEMICONDUCTING SILICON
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页码：573 / 580
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