Generalized aspects of multiple-wavelength techniques in optical metrology

被引：0
|
作者：
Pfeifer, Tilo [1 ]
Tutsch, Rainer [1 ]
Evertz, Jens [1 ]
Weres, Gerd [1 ]
机构：
[1] Fraunhofer-Inst fur, Produktionstechnologie (IPT)
来源：
CIRP Annals - Manufacturing Technology | 1995年 / 44卷 / 01期
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页码：493 / 496
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