Emission of neutral and negative-ion clusters at sputtering of aluminium

被引:0
|
作者
Abdulaeva, M.K.
Atabaev, B.G.
Dzhabbarganov, R.D.
机构
来源
Izvestiya RAN Seriya Fizicheskaya | 1992年 / 56卷 / 06期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] EMISSION OF NEUTRAL AND NEGATIVE-ION CLUSTERS AT GRAPHITE AND SILICON SPUTTERING
    ABDULLAEVA, MK
    ATABAEV, BG
    DZHABBARGANOV, RD
    IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA, 1990, 54 (07): : 1322 - 1325
  • [2] EMISSION OF NEUTRAL AND NEGATIVE-ION CLUSTERS DURING ALUMINUM SPUTTERING
    ABDULLAEVA, MK
    ATABAEV, BG
    DZHABBARGANOV, RD
    IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA, 1992, 56 (06): : 118 - 124
  • [3] NEUTRAL AND NEGATIVE-ION CLUSTER EMISSION DURING SPUTTERING
    ABDULLAEVA, MK
    ATABAEV, BG
    DZABBARGANOV, R
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 62 (01): : 43 - 46
  • [4] THE EMISSION OF NEUTRAL CLUSTERS IN SPUTTERING
    GNASER, H
    HOFER, WO
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1989, 48 (03): : 261 - 271
  • [5] NEGATIVE-ION CHEMISTRY IN CLUSTERS
    ILLENBERGER, E
    BERICHTE DER BUNSEN-GESELLSCHAFT-PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 1992, 96 (09): : 1148 - 1151
  • [6] NEGATIVE-ION REACTIONS WITH NEUTRAL OZONE
    RUTHERFORD, JA
    TURNER, BR
    VROOM, DA
    JOURNAL OF CHEMICAL PHYSICS, 1973, 58 (12): : 5267 - 5271
  • [7] NEGATIVE-ION BASED NEUTRAL SYSTEMS
    HOOPER, EB
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1979, 26 (01) : 1287 - 1291
  • [8] Formation of negative and neutral clusters under ion Cs sputtering on carbide of Si
    Atatbayev, BC
    Djabbarganov, R
    Saidhanova, NG
    IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA, 1998, 62 (04): : 801 - 805
  • [9] Negative-ion formation in collisions of low-energy electrons with neutral sodium clusters
    Kasperovich, V
    Tikhonov, G
    Wong, K
    Kresin, VV
    PHYSICAL REVIEW A, 2000, 62 (06): : 063201 - 063201
  • [10] NEGATIVE-ION EMISSION ON CAESIATED SURFACES
    BERNHEIM, M
    REBIERE, J
    SLODZIAN, G
    JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES, 1980, 5 (02): : 261 - 271