Statistical analysis of field emitter emissivity: application to flat displays

被引:0
|
作者
Texas Instruments, Dallas, United States [1 ]
机构
来源
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 1995年 / 13卷 / 02期
关键词
Field emitter arrays - Fowler-Nordheim plot - Gaussian distribution - Microtip sharpness - Work function;
D O I
暂无
中图分类号
学科分类号
摘要
A new type of field emitter diagnostics has been developed, which takes into account a normal distribution of microtip sharpness. Substantial curvature in the Fowler-Nordheim plot is predicted at very low voltages and currents. From this curvature it is possible to calculate the mean and standard deviation of tip sharpness as well as other parameters relating to the voltage dependence of microtip sharpness. Thirteen Fowler-Nordheim plots are made with three anode voltages and six field emitter display (FED) panels fabricated at Pixel/LETI. Each of the FEDs has about 200 million Spindt-type microtips. Comparison between theory and experiment shows good agreement. The ratio of standard deviation to mean tip sharpness is about 10% for all panels tested. Noise-free measurements are made with very low average currents in the range of 10-16-10-11 A/tip.
引用
收藏
页码:553 / 557
相关论文
共 50 条
  • [1] STATISTICAL-ANALYSIS OF FIELD EMITTER EMISSIVITY - APPLICATION TO FLAT DISPLAYS
    LEVINE, JD
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (02): : 553 - 557
  • [3] FIELD-EMISSION DEVICE MODELING FOR APPLICATION TO FLAT PANEL DISPLAYS
    KESLING, WD
    HUNT, CE
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (02): : 518 - 522
  • [4] Novel emitter structures for field emission displays
    Lin, ME
    Norris, PE
    Tabasky, M
    Vancoppenolle, J
    COCKPIT DISPLAYS VI: DISPLAYS FOR DEFENSE APPLICATIONS, 1999, 3690 : 207 - 212
  • [5] Realization of MW ECR-plasma sources and technological processes for field emitter arrays of large flat displays
    Gulyaev, YV
    Yafarov, RK
    IVMC '96 - 9TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE, TECHNICAL DIGEST, 1996, : 446 - 448
  • [6] Field emitter displays for future high requirements applications
    Jones, GW
    Jones, SK
    Zimmerman, SM
    Fowler, CW
    Prache, O
    Blazejewski, ER
    COCKPIT DISPLAYS III, 1996, 2734 : 66 - 74
  • [7] Field-emitter displays offer performance advantages
    Zimmerman, SM
    LASER FOCUS WORLD, 1998, 34 (05): : A4 - A7
  • [8] Field-emitter array development for field-emission displays
    Spindt, C
    Holland, CE
    Schwoebel, PR
    LIQUID CRYSTAL MATERIALS, DEVICES, AND FLAT PANEL DISPLAYS, 2000, 3955 : 151 - 158
  • [9] Field emitter arrays and displays produced by ion tracking lithography
    Felter, TE
    Musket, RG
    Bernhardt, AF
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 241 (1-4): : 346 - 350
  • [10] STATISTICAL-MODEL OF SEMICONDUCTOR FIELD EMITTER
    BAKHTIZIN, RZ
    GHOTS, SS
    SURFACE SCIENCE, 1992, 266 (1-3) : 121 - 125