STUDY OF ELECTRICALLY ACTIVE DEFECTS IN SILICON WAFERS WITH THE SCANNING ELECTRON MICROSCOPE.

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作者：

Karelin, N.M.

Dusakin, S.I.

Litvinov, Yu.M.

Rau, E.I.

Spivak, G.V.

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来源：

Soviet Microelectronics (English Translation of Mikroelektronika) | 1980年 / 9卷 / 01期

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摘要：

SEMICONDUCTOR MATERIALS

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页码：26 / 30

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