Specific carbonitrided tool of R6M5 and R6M5-P steels is investigated and sampled under conditions of small-batch production. The low-energy consuming equipment is used in high-temperature carbonitriding as well as the undeficient components for carburizing agents. The layer-by-layer carbide, metallographic and microprobe analyses are carried out. Fracture toughness of surfacial layers is determined. It is shown that the carbonitrided tool is high competitive with VK hard alloy tool for wear resistance.