Simultaneous determination of reflectance spectra along with {ψ(E), Δ(E)} in multichannel ellipsometry: Applications to instrument calibration and reduction of real-time data

被引：0

作者：

An, Ilsin ^{[1
]}

Lee, Joungchel ^{[1
]}

Hong, Byungyou ^{[1
]}

Collins, R.W. ^{[1
]}

机构：

[1] Hanyang Univ, Ansan, Korea, Republic of

来源：

Thin Solid Films | 1998年 / 313-314卷 / 1-2期

基金：

美国国家科学基金会;

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：79 / 84

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