Grain matrix made with excimer-laser crystallization of thin silicon films

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作者：
Van Der Wilt, P.Ch. [1 ]
Ishihara, R. [1 ]
机构：
[1] Lab. Electron. Components, T., Delft Inst. Microlectron. S., Delft University of Technology, Feldmannweg 17, NL-2600 GB Delft, Netherlands
来源：
Solid State Phenomena | 1999年 / 67卷
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页码：169 / 173
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