Peculiarities of relief formation under InP surface sputtering will argon ions and atoms

被引：0
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作者：
Soshnikov, I.P. [1 ]
Lunev, A.V. [1 ]
Rotkina, L.G. [1 ]
Gaevskij, M.E. [1 ]
Kudryavtsev, Yu.A. [1 ]
Barchenko, V.T. [1 ]
Yakovlev, S.P. [1 ]
Moskalenko, A. [1 ]
机构：
[1] Fiziko-Tekhnicheskij Inst., RAN, Sankt-Peterburg, Russia
来源：
Fizika i Khimiya Obrabotki Materialov | 2001年 / 03期
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摘要：
17
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页码：24 / 27
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