Transmission electron microscopy of epitaxial SrTiO3 films on LaAlO3 substrates

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作者：
Chalmers Univ of Technology, Goteborg, Sweden [1 ]
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来源：
Microelectron Eng | / 1-4卷 / 309-312期
关键词：
Annealing - Dielectric properties - Epitaxial growth - Lanthanum compounds - Magnetron sputtering - Morphology - Specimen preparation - Strontium compounds - Substrates - Transmission electron microscopy - X ray diffraction;
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摘要：
Three different epitaxial (001) SrTiO3 films deposited on (110) rhombohedral LaAlO3 substrates by rf sputtering, have been characterised using transmission electron microscopy (TEM). The films exhibited different columnar subgrain morphologies with column widths ranging from 7 to 19 nm. Slow cooling in an O2 ambient and in situ annealing at elevated temperature improved the films dielectric tunability and this could be correlated to more narrow column dimensions.
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