Damage production in silicon by MeV Si cluster irradiation

被引：0
|
作者：
Shen, Dingyu [1 ]
Lu, Xiting [1 ]
Xia, Zhonghuang [1 ]
Wang, Xuemei [1 ]
Zao, Qiang [1 ]
机构：
[1] Peking Univ, Beijing, China
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1997年 / 129卷 / 03期
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页码：392 / 396
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