Influence of multi-arc ion plating technique on the interface and microstructure of TiN/Ti and Cr/Cu contact system

被引：0
|
作者：
Lin, Xiu-Hua [1 ]
Liu, Xin [1 ]
机构：
[1] Department of Physics, Stt. Key Lab. Phys. Chem. Solid S., Xiamen University, Xiamen 361005, China
来源：
Wuli Xuebao/Acta Physica Sinica | 2000年 / 49卷 / 11期
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摘要：
11
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页码：2223 / 2224
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