β-FeSi2 continuous films prepared on corning 7059 glass by RF-magnetron sputtering

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作者
Okuda, Yukiko [1 ]
Momose, Noritaka [1 ,2 ]
Takahashi, Masashi [1 ]
Hashimoto, Yoshio [1 ]
Ito, Kentaro [1 ]
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[1] Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan
[2] Department of Electrical and Electronic Engineering, Nagano National College of Technology, 716 Tokuma, Nagano 381-8550, Japan
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页码:6505 / 6507
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