Effect of diamond-like carbon coatings on mechanical properties of near the surface layers of the silicon single crystals

被引：0
|
作者：
Savenko, V.I. [1 ]
Belyanin, A.F. [1 ]
Perevozchikov, B.N. [1 ]
机构：
[1] Inst Fizicheskoj Khimii RAN, Moscow, Russia
来源：
Fizika i Khimiya Obrabotki Materialov | 1997年 / 02期
关键词：
Amorphous films - Carbon - Coatings - Interfaces (materials) - Mechanical properties - Nonmetallic matrix composites - Single crystals - Surface properties - Thin films;
D O I：
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中图分类号：
学科分类号：
摘要：
The thin diamond-like carbon films influence on the mechanical characteristics of Si single crystals by microindentation and microscratching methods has been investigated. It is found that the deposited films presence leads to the strengthening of the Si substrate material, the transition range from placidity to brittleness in contact being shifted up to more considerable indenter loads. Also the fracture toughness (the critical value of stress intensity factor K1c) of the composition is essentially increased.
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页码：59 / 64
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