Silica film preparation by chemical vapor deposition using vacuum ultraviolet excimer lamps

被引：0
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作者：
Kurosawa, K. [1 ]
Yanagida, H. [1 ]
Takezoe, N. [1 ]
Kawasaki, Y. [1 ]
Fujita, G. [1 ]
Miyano, I. [1 ]
Yokotani, A. [1 ]
机构：
[1] Inst for Molecular Science, Okazaki, Japan
来源：
Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest | 2000年
关键词：
The absorption spectra of TEOS gas was carried out by the Joint Studies Program (1999–2000) of the Institute for Molecular Science. This work was partly supported by NEDO (New Energy Development Organization) and partly by Miyazaki Prefecture;
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