共 50 条
- [1] SURFACE MORPHOLOGIES AND ELECTRICAL-PROPERTIES OF (BA,SR)TIO3 FILMS PREPARED BY 2-STEP DEPOSITION OF LIQUID SOURCE CHEMICAL-VAPOR-DEPOSITION JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (9B): : 5077 - 5082
- [2] Step coverage and electrical properties of (Ba,Sr)TiO3 films prepared by liquid source chemical vapor deposition DIELECTRIC MATERIAL INTEGRATION FOR MICROELECTRONICS, 1998, 98 (03): : 190 - 195
- [3] Reaction mechanism and electrical properties of (Ba, Sr)TiO3 films prepared by liquid source chemical vapor deposition Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1996, 35 (4 B): : 2530 - 2535
- [4] Reaction mechanism and electrical properties of (Ba, Sr)TiO3 films prepared by liquid source chemical vapor deposition JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (4B): : 2530 - 2535
- [5] Step coverage and electrical properties of (Ba, Sr)TiO3 films prepared by liquid source chemical vapor deposition using TiO(DPM)2 Kawahara, Takaaki, 1600, JJAP, Minato-ku, Japan (33):
- [7] Electrical properties of sputtered (Ba, Sr)TiO3 thin films prepared by two-step deposition method Journal of Electronic Materials, 1999, 28 : L9 - L12
- [8] (Ba, Sr)TiO3 films prepared by liquid source chemical vapor deposition on Ru electrodes Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1996, 35 (9 B): : 4880 - 4885
- [9] (Ba, Sr)TiO3 films prepared by liquid source chemical vapor deposition on Ru electrodes JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (9B): : 4880 - 4885