Surface morphologies and electrical properties of (Ba, Sr)TiO3 films prepared by two-step deposition of liquid source chemical vapor deposition

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作者
Kawahara, Takaaki [1 ]
Yamamuka, Mikio [1 ]
Yuuki, Akimasa [1 ]
Ono, Kouichi [1 ]
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[1] Mitsubishi Electric Corp, Hyogo, Japan
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页码:5077 / 5082
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