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- [5] Optimization of a SCCO2 post-etch cleaning for copper interconnections ULTRA CLEAN PROCESSING OF SEMICONDUCTOR SURFACES VIII, 2008, 134 : 345 - +
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- [9] In-situ Cleaning of Post-etch Byproducts by Manipulating Dechucking Environment Gas in Silicon Etch Process 2022 33RD ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC), 2022,
- [10] Screening and Evaluation of Different Wet Cleaning Solutions for Post Etch Residue Removal in BEOL Applications CLEANING AND SURFACE CONDITIONING TECHNOLOGY IN SEMICONDUCTOR DEVICE MANUFACTURING 11, 2009, 25 (05): : 101 - 107