Elastic recoil detection analysis of hydrogen content in hydrogenated amorphous silicon films

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作者：
机构：
[1] Kudo, Hiroshi
[2] Kawazu, Yunosuke
[3] Miura, Akira
[4] Arai, Toshihiro
来源：
Kudo, Hiroshi | 1600年 / 29期
关键词：
Hydrogen--Analysis; -; Ions--Scattering; Sulfur;
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摘要：
By using Rutherford elastic recoil induced by 60 MeV S7+, the hydrogen content in hydrogenated amorphous silicon films has been measured during annealing in vacuum. Decrease in the hydrogen content, resulting from hydrogen evolution, was observed when the samples were heated above 300°C. The results demonstrate the usefulness of this technique for measuring average hydrogen content within the films.
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