Surface Reaction Kinetics in Metalorganic Vapor Phase Epitaxy of GaAs through Analyses of Growth Rate Profile in Wide-Gap Selective-Area Growth

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[1] [1,Oh, Ho-Jin
[2] 2,Sugiyama, Masakazu
[3] 3,Nakano, Yoshiaki
[4] Shimogaki, Yukihiro
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Oh, H.-J. | 1600年 / Japan Society of Applied Physics卷 / 42期
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