a-SiGe:H and a-SiGec:H black-matrix films for Liquid Crystal Displays

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[1] Kato, Yoshimine
[2] Kaida, Yoshimasa
[3] Miyoshi, Yuki
[4] Atsumi, Masakazu
[5] Stathis, James
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Kato, Y. (kiho@mmm-keio.net) | 1600年 / Japan Society of Applied Physics卷 / 43期
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