Unexpectedly high sputtering yield of carbon at grazing angle of incidence ion bombardment

被引：0
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作者：
Barna, A. [1 ]
Menyhard, M. [1 ]
Kotis, L. [1 ]
Kovacs, Gy.J. [1 ]
Radnoczi, G. [1 ]
Zalar, A. [2 ]
Panjan, P. [2 ]
机构：
[1] Research Institute for Technical Physics and Materials Science, Budapest H-1525 P.O. Box 49, Hungary
[2] Jozef Stefan Institute, Jamova 39, 1000 Ljubljana, Slovenia
来源：
Journal of Applied Physics | 2005年 / 98卷 / 02期
关键词：
Number:; P2-0082; SLO; 14/03; Acronym:; -; Sponsor:; T; 035267; T043704; OTKA; Sponsor: Hungarian Scientific Research Fund;
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