Noncontact measuring profile of magnetic disk with optical methods

被引：0
|
作者：
Zhao, Yang [1 ]
Li, Dacheng [1 ]
Cao, Mang [1 ]
Wang, Jia [1 ]
机构：
[1] Tsinghua Univ., Beijing, China
来源：
Proceedings of SPIE - The International Society for Optical Engineering | 1994年 / 2321卷
关键词：
4;
D O I：
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页码：235 / 237
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