ION PROJECTION LITHOGRAPHY FOR SUB-MICRON MODIFICATION OF MATERIALS.

被引：0

作者：

Stengl, Gerhard ^{[1
]}

Loeschner, Hans ^{[1
]}

Wolf, Peter ^{[1
]}

机构：

[1] Ion Microfabrication Systems, Gesellschaft mbH, Vienna, Austria, Ion Microfabrication Systems Gesellschaft mbH, Vienna, Austria

来源：

关键词：

ION OPTICS - ION PROJECTION LITHOGRAPHY - ION PROJECTION LITHOGRAPHY MACHINE;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：987 / 994

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