Ionic species in 13.56 MHz discharges in CF4 gas and mixtures of it with Ar and O2

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Yamanashi Univ, Kofu, Japan [1 ]
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Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1997年 / 36卷 / 7 B期
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页码：4648 / 4650
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