Ballistic electron emission microscopy study of barrier height inhomogeneities introduced in Au/n-Si Schottky contacts by a HF pretreatment

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Detavernier, C. [1 ]
Van Meirhaeghe, R.L. [1 ]
Donaton, R. [1 ]
Maex, K. [1 ]
Cardon, F. [1 ]
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[1] Univ of Gent, Gent, Belgium
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