Fabricated on a GaAs-based Semiconductor-on-Insulator Substrate Using a Spin-On Low-k Dielectric Film

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[1] Sato, Kuninori
[2] Ohno, Yutaka
[3] Kishimoto, Shigeru
[4] Maezawa, Koichi
[5] Mizutani, Takashi
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Sato, K. (k_satou@echo.nuee.nagoya-u.ac.jp) | 1600年 / Japan Society of Applied Physics卷 / 42期
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