Novel fabrication process for high-aspect-ratio and co-axial multi-layer nickel microstructures

被引：0
|
作者：
Lin, Ching-Bin [1 ]
Wei, Mau-Kuo [1 ]
Liu, Chun-Hung [1 ]
Yen, Chung-Hsing [1 ]
Su, Zheng-Bing [1 ]
Tai, Yin-Teng [1 ]
Chen, Zhi-Hong [1 ]
机构：
[1] Univ of Tamkang, Tamsui, Taiwan
来源：
Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) | 2000年
关键词：
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学科分类号：
摘要：
Microelectromechanical devices
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页码：584 / 589
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