Out-of-plane refractive microlens for free-space integrated optics

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UCLA, Los Angeles, United States [1 ]
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Conf Proc Laser Electr Optic Soc Annu Meet | / 459-460期
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Calculations - Helium neon lasers - Integrated optics - Micromachining - Microscopes - Optical collimators - Optical fibers - Photoresists - Semiconductor device manufacture - Semiconductor device structures - Substrates - Surfaces;
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摘要：
An out-of-plane spherical microlens standing perpendicular to the substrate has been demonstrated for the first time using surface-micromachining technology. Light emitted from an optical fiber is successfully collimated by the microlens to a divergence angle of 0.15°, and the focal length is measured to the 645 μm. These microlenses can be combined with other out-of-plane micro-optical components on a silicon substrate to from a free-space micro-optical bench.
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