Mesa-supported, single-crystal microstructures fabricated by the surface/bulk micromachining process

被引：0
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作者：
Park, Sangjun [1 ]
Lee, Sangwoo [1 ]
Yi, Sangwoo [1 ]
Cho, Dong-il Dan [1 ]
机构：
[1] Seoul Natl Univ, Seoul, Korea, Republic of
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 7 A期
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页码：4244 / 4249
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