Microstructure and properties of annealed ZnO thin films deposited by magnetron sputtering

被引：0
|
作者：
Lee, J. [1 ]
Gao, W. [2 ]
Li, Z. [2 ]
Hodgson, M. [2 ]
Asadov, A. [2 ]
Metson, J. [3 ]
机构：
[1] Department of Mechanical Engineering, University of Auckland, Auckland 1004, New Zealand
[2] Department of Chemical and Materials Engineering, University of Auckland, Auckland 1004, New Zealand
[3] Department of Chemistry, University of Auckland, Private Bag 92019, New Zealand
来源：
Acta Metallurgica Sinica (English Letters) | 2005年 / 18卷 / 03期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Thin films
引用
收藏
页码：177 / 183
相关论文
共 50 条
  • [1] MICROSTRUCTURE AND PROPERTIES OF ANNEALED ZnO THIN FILMS DEPOSITED BY MAGNETRON SPUTTERING
    J. Lee
    M. Hodgson
    A. Asadov
    J. Metson
    Acta Metallurgica Sinica(English Letters), 2005, (03) : 177 - 183
  • [2] Microstructure of ZnO thin films deposited by high power impulse magnetron sputtering
    Reed, A. N.
    Shamberger, P. J.
    Hu, J. J.
    Muratore, C.
    Bultman, J. E.
    Voevodin, A. A.
    THIN SOLID FILMS, 2015, 579 : 30 - 37
  • [3] Properties of fluorine doped ZnO thin films deposited by magnetron sputtering
    Yoon, H. S.
    Lee, K. S.
    Lee, T. S.
    Cheong, B.
    Choi, D. K.
    Kim, D. H.
    Kim, W. M.
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2008, 92 (11) : 1366 - 1372
  • [4] On the microstructure of magnesium thin films deposited by magnetron sputtering
    Moens, Filip
    Schramm, Isabella Citlalli
    Konstantinidis, Stephanos
    Depla, Diederik
    THIN SOLID FILMS, 2019, 689
  • [5] Properties presented by ZnO thin films deposited by magnetron sputtering and spray pyrolysis
    Nunes, P
    Fortunato, E
    Martins, R
    Vilarinho, P
    ADVANCED MATERIALS FORUM I, 2002, 230-2 : 424 - 427
  • [6] Optical properties of ZnO thin films deposited by dc reactive magnetron sputtering
    Meng, Li-Jian
    Andritschky, M.
    dos Santos, M.P.
    Vacuum, 1993, 44 (02): : 105 - 109
  • [7] Preparation and Properties of ZnO:Mo Thin Films Deposited by RF Magnetron Sputtering
    Ma, Jianhua
    Liang, Yan
    Zhu, Xiaojing
    Jiang, Jinchun
    Wang, Shanli
    Yao, Niangjuan
    Chu, Junhao
    SEVENTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS, 2011, 7995
  • [8] Microstructure and optical properties of SiCN thin films deposited by reactive magnetron sputtering
    Peng, Yinqiao
    Zhou, Jicheng
    Gong, Jiehong
    Yu, Qinrong
    MATERIALS LETTERS, 2014, 131 : 148 - 150
  • [9] Microstructure and electrical properties of CoNX thin films deposited by unbalanced magnetron sputtering
    Asahara, H
    Migita, T
    Tanaka, T
    Kawabata, K
    VACUUM, 2001, 62 (2-3) : 293 - 296
  • [10] Microstructure and optical properties of ZnO thin film buffer layer deposited by magnetron sputtering
    Li, Wei, 1600, Science Press (43):
12345