LUMINESCENCE METHOD AND DEVICE FOR THE CONTROL OF UNIFORMITY OF DIELECTRIC COATINGS ON SILICON WAFERS.

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作者：
Aksel'rod, I.L. [1 ]
Vereshchagin, V.G. [1 ]
Zakharov, A.N. [1 ]
Kurkin, Yu.P. [1 ]
Skotnikov, M.M. [1 ]
Tsarev, V.P. [1 ]
机构：
[1] Moscow Technological Inst of the, Meat & Dairy Industry, Moscow,, USSR, Moscow Technological Inst of the Meat & Dairy Industry, Moscow, USSR
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| 1600年 / 51期
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