Fatigue characteristics of sol-gel derived Pb(Zr, Ti)O3 thin films

被引：0

作者：

Amanuma, Kazushi ^{[1
]}

Hase, Takashi ^{[1
]}

Miyasaka, Yoichi ^{[1
]}

机构：

[1] NEC Corp, Kawasaki, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1994年 / 33卷 / 9 B期

关键词：

Capacitors - Coercive force - Composition effects - Electric discharges - Electric space charge - Fatigue of materials - Lanthanum - Lead compounds - Polarization - Sol-gels - Thermal effects - Thin films;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Fatigue mechanisms of sol-gel derived Pb(Zr-Ti)O3 (PZT) thin films and the effects of La addition on the fatigue characteristics were investigated. For PZT(40/60) and PZT(53/47), the remanent polarization (Pr) and the coercive field (Ec) decreased with switching cycles. These properties were restored by heating the fatigued films above their Curie temperature. This result indicates that domain pinning is the dominant fatigue mechanism for PZT(40/60) and PZT(53/47). On the other hand, for PZT(70/30), Pr was almost constant and Ec increased with switching cycles; this implies that the fatigue mechanism for PZT(70/30) is different from that for PZT(40/60) and PZT(53/47). Addition of La to the PZT(53/47) film reduced space charge in the film, though did not improve fatigue characteristics.

引用

页码：5211 / 5214

共 50 条

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