Fabrication of cadmium oxide thin films using the Langmuir-Blodgett deposition technique

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作者
Queen's Univ, Kingston, Canada [1 ]
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来源
Thin Solid Films | / 1-2卷 / 260-265期
基金
加拿大自然科学与工程研究理事会;
关键词
Annealing - Atomic force microscopy - Cadmium compounds - Decomposition - Electric conductivity measurement - Film preparation - Langmuir Blodgett films - Laser applications - Oxidation - Oxides - Surface roughness;
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摘要
Thin conducting cadmium oxide (CdO) films were fabricated from Langmuir-Blodgett Cd arachidate precursors through a combination of low temperature ultra-violet/ozone (UVO) decomposition and annealing treatments. The decomposition and oxidation of the UVO residue to CdO occurred between 220 to 300 °C, and was observed using in-situ laser reflectivity and resistivity measurements. The final CdO film resistivities were in the 104-105 Ω/ range, depending on annealing conditions. Atomic force microscopy revealed nanometre-scale surface roughness in the final film, which most likely resulted in the lower conductivity measured in the film as compared to bulk CdO fabrication techniques.
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