共 50 条
- [3] Characterization of magnetron-sputtered partially ionized aluminum deposition JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (02): : 624 - 627
- [5] Morphological and Structural Characterization of Magnetron-Sputtered Aluminum and Aluminum-Boron Thin Films CRYSTALS, 2021, 11 (05):
- [7] RF magnetron sputtered aluminum oxide films for MEMS PROCEEDINGS OF THE 2007 INTERNATIONAL WORKSHOP ON THE PHYSICS OF SEMICONDUCTOR DEVICES: IWPSD-2007, 2007, : 682 - +