Fabrication and evaluation of flexible microgripper

被引：0
|
作者：
Suzuki, Yoshihiko [1 ]
机构：
[1] Nikon Corp, Tokyo, Japan
来源：
| 1600年 / JJAP, Minato-ku, Japan卷 / 33期
关键词：
Microelectromechanical devices;
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