Preparation and stress evaluation of ferroelectric thin films of PZT based pyroelectric sensors

被引：0
|
作者：
Padmini, P.
Krawietz, R.
Köhler, R.
Gerlach, G.
机构：
[1] Institut Für Festkörperelektronik, TU Dresden, Germany
[2] Institut Für Werkstoffwissenschaft, TU Dresden, Germany
来源：
Ferroelectrics | 1999年 / 228卷 / 01期
关键词：
One of the authors P. Padmini would like to acknowledge the financial support of the Alexander von Humboldt Foundation by way of a Post Doctoral Fellowship;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
10
引用
收藏
页码：79 / 89
相关论文
共 50 条
  • [1] Preparation and stress evaluation of ferroelectric thin films of PZT based pyroelectric sensors
    Padmini, P
    Krawietz, R
    Köhler, R
    Gerlach, G
    FERROELECTRICS, 1999, 228 (1-4) : 79 - 89
  • [2] Sputtered ferroelectric PZT thin films in pyroelectric infrared sensors
    Padmini, P
    Köhler, R
    Gerlach, G
    Bruchhaus, R
    Hofmann, G
    JOURNAL DE PHYSIQUE IV, 1998, 8 (P9): : 151 - 154
  • [3] DYNAMICAL DEFORMATION SENSORS BASED ON THIN FERROELECTRIC PZT FILMS
    SUROWIAK, Z
    CZEKAJ, D
    BAKIROV, AA
    DUDKEVICH, VP
    THIN SOLID FILMS, 1995, 256 (1-2) : 226 - 233
  • [4] Preparation of PZT Ferroelectric Thin Films By Electrochemical Reduction
    Ren, P. F.
    Zhu, J. L.
    Zou, X. P.
    Cheng, J.
    Li, F.
    Zhang, H. D.
    Zhu, G.
    Wang, M. F.
    Su, Y.
    2008 2ND IEEE INTERNATIONAL NANOELECTRONICS CONFERENCE, VOLS 1-3, 2008, : 310 - 314
  • [5] Pyroelectric devices based on sputtered PZT thin films
    Kohler, R
    Neumann, N
    Hess, N
    Bruchhaus, R
    Wersing, W
    Simon, M
    FERROELECTRICS, 1997, 201 (1-4) : 83 - 92
  • [6] Preparation and properties of the ferroelectric thin PZT films.
    Czekaj, D
    Surowiak, Z
    Dudkevich, VP
    Bakirov, AA
    METAL/NONMETAL MICROSYSTEMS: PHYSICS, TECHNOLOGY, AND APPLICATIONS, 1996, 2780 : 230 - 234
  • [7] Pyroelectric and photoelectric responses of capacitors based on thin PZT films
    Bogomolov, A. A.
    Sergeeva, O. N.
    Kiselev, D. A.
    Pronin, I. P.
    Afanas'ev, V. P.
    PHYSICS OF THE SOLID STATE, 2006, 48 (06) : 1194 - 1196
  • [8] Pyroelectric and photoelectric responses of capacitors based on thin PZT films
    A. A. Bogomolov
    O. N. Sergeeva
    D. A. Kiselev
    I. P. Pronin
    V. P. Afanas’ev
    Physics of the Solid State, 2006, 48 : 1194 - 1196
  • [9] Piezoelectric and pyroelectric microsystems based on ferroelectric thin films
    Muralt, P
    ISAF '96 - PROCEEDINGS OF THE TENTH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2, 1996, : 145 - 151
  • [10] Fabrication and characterization of fast response pyroelectric sensors based on Fe-doped PZT thin films
    Fouladi, Farhad
    Javid, Ehsan
    Jalili, Yousef Seyed
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2016, 27 (06) : 6578 - 6585
12345