Production and investigation of boron nitride thin films

被引:0
|
作者
Inst Khimii im. V.I. Nikitina AN RT, Dushanbe, Tajikistan [1 ]
机构
来源
Fiz Khim Obr Mater | / 2卷 / 82-83期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] THIN FILMS OF BORON NITRIDE
    PATTERSON, RJ
    HUMPHRIES, RD
    HABERECHT, RR
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1963, 110 (03) : C60 - C60
  • [2] Characterization of Boron Nitride Thin Films
    Chubarov, M.
    Pedersen, H.
    Hogberg, H.
    Filippov, S.
    Engelbrecht, J. A. A.
    O'Connel, J.
    Henry, A.
    2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR), 2013,
  • [3] Adhered property of cubic boron nitride thin films and cutting property by cubic boron nitride thin films
    Noma, Masao
    Komatsu, Eiji
    Tokoro, Toshio
    Ogawa, Keiji
    Nakagawa, Heisaburo
    Journal of the Vacuum Society of Japan, 2008, 51 (06) : 392 - 396
  • [4] Synthesis of cubic boron nitride thin films
    McKenzie, DR
    McFall, WD
    Reisch, S
    James, BW
    Falconer, IS
    Boswell, RW
    Persing, H
    Perry, AJ
    Durandet, A
    SURFACE & COATINGS TECHNOLOGY, 1996, 78 (1-3): : 255 - 262
  • [5] Growth and characterisation of boron nitride thin films
    Plass, M.F.
    Fukarek, W.
    Kolitsch, A.
    Kreissig, U.
    Surface and Coatings Technology, 1996, 84 (1 -3 pt 2): : 383 - 387
  • [6] Infrared analysis of boron nitride thin films
    Plass, MF
    Fukarek, W
    Kolitsch, A
    Moller, W
    TRENDS AND NEW APPLICATIONS OF THIN FILMS, 1998, 287-2 : 269 - 269
  • [7] Nucleation of cubic boron nitride thin films
    Collazo-Davila, C
    Bengu, E
    Marks, LD
    Kirk, M
    DIAMOND AND RELATED MATERIALS, 1999, 8 (06) : 1091 - 1100
  • [8] Properties of amorphous boron nitride thin films
    Siemens Microelectronics Cent GmbH, Dresden, Germany
    J Non Cryst Solids, pt 1 (403-406):
  • [9] Growth and characterisation of boron nitride thin films
    Plass, MF
    Fukarek, W
    Kolitsch, A
    Kreissig, U
    SURFACE & COATINGS TECHNOLOGY, 1996, 84 (1-3): : 383 - 387
  • [10] Layered growth of boron nitride thin films
    Plass, MF
    Fukarek, W
    Kolitsch, A
    Schell, N
    Moller, W
    THIN SOLID FILMS, 1997, 305 (1-2) : 172 - 184