High coercive NdFeB thin film obtained by diffusion annealing

被引:0
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作者
Kim, M.J.
Kim, Y.B.
Li, Y.
Suhr, D.S.
Kim, C.O.
Kim, T.K.
机构
[1] Korea Research Institute of Standards and Science, Taejon 305-600, Korea, Republic of
[2] Kongju National University, Kongju 314-701, Chungnam, Korea, Republic of
[3] Chungnam National University, Taejon 305-340, Korea, Republic of
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关键词
Annealing - Coercive force - Film preparation - Magnetic properties - Microstructure;
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摘要
The magnetic properties and microstructure of diffusion annealed [Ta/Nd/NdFeB/Nd/Ta] thin films have been investigated. The films were deposited on Si substrate with various thickness ratio of Nd/NdFeB layer (R=0-3.3), then diffused and crystallized by annealing at 650°C for 10 min. The film without Nd layer showed soft magnetic behavior and high content of α-Fe phase. The films with R1 showed good hard magnetic properties with the high coercivity of about 20 kOe.
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页码:111 / 112
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