Preparation of smooth YBa2Cu3Oy and EuBa2Cu3Oy films by two-beam excimer laser deposition

被引：0

作者：

Schauer, T. ^{[1
]}

Weber, L. ^{[1
]}

Hafner, J. ^{[1
]}

Kus, O. ^{[1
]}

Pechen, E.V. ^{[1
]}

Varlashkin, A.V. ^{[1
]}

Kaiser, T. ^{[1
]}

Renk, K.F. ^{[1
]}

机构：

[1] Universitaet Regensburg, Regensburg, Germany

来源：

Superconductor Science and Technology | 1998年 / 11卷 / 03期

关键词：

Deposition - Excimer lasers - Laser beams - Molecules - Prisms - Pulsed laser applications;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

A laser deposition arrangement for the preparation of smooth YBa2Cu3Oy and EuBa2Cu3Oy films is presented. An excimer laser beam is split by a knife-edge prism into two beams, which are focused onto two rotating targets oriented perpendicular to each other. The two laser-induced molecular streams collide and form a new stream containing mainly light molecules and almost no droplets. The molecules from this stream deposit on a substrate that is placed in the shadow of the original molecular streams. The use of copper-poor targets prevented the occurrence of precipitates.

引用

页码：270 / 272

共 50 条

[1] Preparation of smooth YBa2Cu3Oy and EuBa2Cu3Oy films by two-beam excimer laser deposition
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