Pulsed laser deposition of diamond-like carbon films on gated Si field emitter arrays for improved electron emission

被引：0
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作者：
Yavas, Oguz [2 ]
Hashimoto, Takeshi [2 ]
Suzuki, Naoki [2 ]
Takai, Mikio [2 ]
Higuchi, Yohei [2 ]
Kobayashi, Michihiro [2 ]
Hosono, Akihiko [1 ]
Okuda, Soichiro [1 ]
机构：
[1] Advanced Technology R and D Center, Mitsubishi Electric Corporation, 1-1 Tsukaguchi-Honmachi 8, Amagasaki, Hyogo 661-0001, Japan
[2] Res. Ctr. Mat. Sci. Extreme C., Grad. School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 12 B期
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页码：7208 / 7212
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