Optimization of sublimation growth of SiC bulk crystals using modeling

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作者
Ramm, M.S. [1 ]
Mokhov, E.N. [1 ]
Demina, S.E. [1 ]
Ramm, M.G. [1 ]
Roenkov, A.D. [1 ]
Vodakov, Yu.A. [1 ]
Segal, A.S. [2 ]
Vorob'ev, A.N. [2 ]
Karpov, S.Yu. [3 ]
Kulik, A.V. [3 ]
Makarov, Yu.N. [4 ]
机构
[1] A.F. Ioffe Physical Technical Institute, Russian Academy of Sciences, Polytechnicheskaya 26, 194021 St. Petersburg, Russia
[2] Computer Technology Department, Institute of Fine Mechanics and Optics, Sablinskaya 14, 197101 St. Petersburg, Russia
[3] Soft-Impact Ltd., P.O. Box 33, 194156 St. Petersburg, Russia
[4] Fluid Mechanics Department, University of Erlangen-Nurnberg, Cauerstrasse 4, D-91058 Erlangen, Germany
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页码:107 / 112
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