Time-of-flight distributions of Si atoms ejected by KrF laser ablation of Si3N4

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作者：
Nakata, Yoshiki [1 ]
Okada, Tatsuo [1 ]
Maeda, Mitsuo [1 ]
机构：
[1] Kyushu Univ, Fukuoka, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1995年 / 34卷 / 8 A期
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页码：4079 / 4080
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