TO DYE OR NOT TO DYE - SOME ASPECTS OF TODAY'S RESIST TECHNOLOGY.

被引：3

作者：

Bolsen, M. ^{[1
]}

机构：

[1] Hoechst AG, Wiesbaden, West Ger, Hoechst AG, Wiesbaden, West Ger

来源：

Microelectronic Engineering | 1985年 / 3卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(85)90042-5

中图分类号：

学科分类号：

摘要：

引用

页码：321 / 328

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