Structure of thin film coatings obtained by ion-plasma sputtering with ion implantation. Modelling by molecular dynamics method

被引：0
|
作者：
Belyj, A.V. [1 ]
Komarov, F.F. [1 ]
Fedotov, S.A. [1 ]
机构：
[1] Fiziko-Tekhnicheskij Inst AN, Belarusi, Minsk, Belarus
来源：
Trenie i Iznos | 1993年 / 14卷 / 03期
关键词：
Coating structure - Molecular dynamics;
D O I：
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摘要：
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页码：513 / 518
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