INFLUENCE OF THERMAL ANNEALING ON OPTICAL PROPERTIES OF HYDROGENATED AMORPHOUS CARBON FILMS.

被引：0
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作者：
Chen, Shuguang
Lin, Shuhan
机构：
来源：
Hongwai Yanjiu, A-ji/Chinese Journal of Infrared Research A | 1987年 / 6卷 / 05期
关键词：
FILMS - Optical Properties - HEAT TREATMENT - Annealing - HYDROGEN;
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摘要：
Using spectroscopic ellipsometry, the influence of thermal annealing on optical properties of the plasma-deposited hydrogenated amorphous carbon films is investigated. The results show that the optical properties of these films change obviously under the condition of 500 degree C annealing temperature. The refractive index is decreased at shorter wavelengths, and increased at longer wavelengths. The extinction coefficient, absorption coefficient and the reflectivity are all increased gradually with the increase of the annealing temperature. But the optical gap is decreased gradually. These results have been discussed.
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页码：335 / 340
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