Strain imaging of lead-zirconate-titanate thin film by tunneling acoustic microscopy

被引：0
|
作者：
Keiji, Takata [1 ]
Keiko, Kushida [1 ]
Kazuyoshi, Torii [1 ]
Hiroshi, Miki [1 ]
机构：
[1] Hitachi Ltd, Saitama, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1994年 / 33卷 / 5 B期
关键词：
Electric fields - Imaging techniques - Lead compounds - Piezoelectric materials - Piezoelectricity - Polarization - Strain - Thin films - Vibrations (mechanical);
D O I：
暂无
中图分类号：
学科分类号：
摘要：
This paper presents a new method for imaging of the piezoelectric property of piezoelectric films with high resolution using tunneling acoustic microscopy. This method is based on detecting fine strains generated by the tip voltage. Such strain is detected either through the surface displacement of the piezoelectric film or through a vibration generated in the film. This method enables us to measure and image the piezoelectric constants, polarization directions, and coercive electric fields of piezoelectric materials.
引用
收藏
页码：3193 / 3196
相关论文
共 50 条
  • [1] STRAIN IMAGING OF LEAD-ZIRCONATE-TITANATE THIN-FILM BY TUNNELING ACOUSTIC MICROSCOPY
    KEIJI, T
    KEIKO, K
    KAZUYOSHI, T
    HIROSHI, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (5B): : 3193 - 3196
  • [2] FATIGUE AND PHOTORESPONSE OF LEAD-ZIRCONATE-TITANATE THIN-FILM CAPACITORS
    LEE, J
    ESAYAN, S
    SAFARI, A
    RAMESH, R
    INTEGRATED FERROELECTRICS, 1995, 6 (1-4) : 289 - 300
  • [3] DOMAIN BEHAVIOR IN LEAD-ZIRCONATE-TITANATE (PZT) THIN-FILM CAPACITORS
    YOO, IK
    DESU, SB
    INTEGRATED FERROELECTRICS, 1995, 6 (1-4) : 329 - 336
  • [4] REACTIVE ION ETCHING OF LEAD-ZIRCONATE-TITANATE (PZT) THIN-FILM CAPACITORS
    VIJAY, DP
    DESU, SB
    PAN, W
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1993, 140 (09) : 2635 - 2639
  • [5] Electron trapping process in ferroelectric lead-zirconate-titanate thin-film capacitors
    Chen, HM
    Lee, JYM
    APPLIED PHYSICS LETTERS, 1998, 73 (03) : 309 - 311
  • [6] EPITAXIAL LEAD-ZIRCONATE-TITANATE THIN-FILMS ON SAPPHIRE
    BRAUN, W
    KWAK, BS
    ERBIL, A
    BUDAI, JD
    WILKENS, BJ
    APPLIED PHYSICS LETTERS, 1993, 63 (04) : 467 - 469
  • [7] Fatigue anisotropy in lead-zirconate-titanate
    Lupascu, DC
    Verdier, C
    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2004, 24 (06) : 1663 - 1667
  • [8] FRACTURE PROCESSES IN LEAD-ZIRCONATE-TITANATE
    MECHOLSKY, JJ
    STORZ, LJ
    HEALEY, JT
    AMERICAN CERAMIC SOCIETY BULLETIN, 1981, 60 (03): : 377 - 377
  • [9] Control of grain structure of sputtering lead-zirconate-titanate thin film using amorphous lead-titanate buffer layer
    Sakoda, T
    Aoki, K
    Fukuda, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (9A): : 5162 - 5165
  • [10] Electrode dependences of switching endurance properties of lead-zirconate-titanate thin-film capacitors
    Aoki, K
    Fukuda, Y
    Numata, K
    Nishimura, A
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (4A): : 2210 - 2215
12345