Polarized optical heterodyne profilometer

被引：0
|
作者：
Huang, Yeu-Chuen [1 ]
Chou, Chien [1 ]
Chou, Ling-Yu [1 ]
Shyu, Jenn-Chyang [1 ]
Chang, Ming [1 ]
机构：
[1] Chuan Yuan Christian Univ, Chung Li, Taiwan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1998年 / 37卷 / 01期
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学科分类号：
摘要：
19
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页码：351 / 354
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