Two-dimensional measurement of He metastable atom density profile in front of substrate in electron cyclotron resonance plasma flow by laser-induced fluorescence spectroscopy

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Dept. of Appl. Physics and Chemistry, Faculty of Engineering, Hiroshima University, Higashi-Hiroshima 739-8527, Japan ^{[1
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Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap | / 7 B卷 / 4380-4382期

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[1] Two-dimensional measurement of He metastable atom density profile in front of substrate in electron cyclotron resonance plasma flow by laser-induced fluorescence spectroscopy
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