Process optimization for production of sub-20 nm soft x-ray zone plates

被引：0
|
作者：
Spector, S.J.
Jacobsen, C.J.
Tennant, D.M.
机构：
来源：
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 1997年 / 15卷 / 06期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Process optimization for production of sub-20 nm soft x-ray zone plates
    Spector, SJ
    Jacobsen, CJ
    Tennant, DM
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (06): : 2872 - 2876
  • [2] Process development for improved soft X-ray zone plates
    Reinspach, J.
    Lindblom, M.
    van Hofsten, O.
    Bertilson, M.
    Hertz, H. M.
    Holmberg, A.
    MICROELECTRONIC ENGINEERING, 2010, 87 (5-8) : 1583 - 1586
  • [3] Sub-20 nm x-ray nanolithography using conventional mask technologies on monochromatized synchrotron radiation
    Simon, G
    Haghiri-Gosnet, AM
    Bourneix, J
    Decanini, D
    Chen, Y
    Rousseaux, F
    Launois, H
    Vidal, B
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (06): : 2489 - 2494
  • [4] Fabrication of soft X-ray condenser zone plates
    Fu, Shaojun
    Hong, Yilin
    Tao, Xiaoming
    Su, Yonggang
    Guangxue Xuebao/Acta Optica Sinica, 1995, 15 (08): : 1148 - 1150
  • [5] Nickel zone plates for soft X-ray microscopy
    Peuker, M
    X-RAY MICROSCOPY, PROCEEDINGS, 2000, 507 : 682 - 687
  • [6] Sub-40 nm pattern replication with +/-20% process latitude by soft contact x-ray lithography
    Carter, DJD
    Smith, HI
    Rhee, KW
    Marrian, C
    EMERGING LITHOGRAPHIC TECHNOLOGIES III, PTS 1 AND 2, 1999, 3676 : 70 - 78
  • [7] OPTIMUM ZONE PLATES FOR THE SOFT X-RAY RANGE.
    Tatchyn, Roman
    Csonka, P.L.
    Lindau, I.
    Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1983, 222 (1-2) : 51 - 59
  • [8] Nickel-germanium soft x-ray zone plates
    Lindblom, Magnus
    Reinspach, Julia
    von Hofsten, Olov
    Bertilson, Michael
    Hertz, Hans M.
    Holmberg, Anders
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 27 (03): : L5 - L7
  • [9] Hydrogen silsesquioxane double patterning process for 12 nm resolution x-ray zone plates
    Chao, Weilun
    Kim, Jihoon
    Rekawa, Senajith
    Fischer, Peter
    Anderson, Erik
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 27 (06): : 2606 - 2611
  • [10] 13 nm high-efficiency nickel-germanium soft x-ray zone plates
    Reinspach, Julia
    Lindblom, Magnus
    Bertilson, Michael
    von Hofsten, Olov
    Hertz, Hans M.
    Holmberg, Anders
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2011, 29 (01):
12345